概述

i-Line The NSR-SF155 is the seventh generation SF system. The SF155 design incorporates the groundbreaking Skyhook platform of the SF150 system, but includes key performance enhancements. Like the SF150, the SF155 uses optimized load and unload positioning to reduce wafer exchange time, along with increased alignment processing speed to shorten wafer alignment time. The SF155 uses the same lightweight wafer stage as the SF150, but minimizes stage settling time to further boost system throughput. These recent design optimizations enable the SF155 to deliver more than 200 wafers (300 mm) per hour. NSR-SF155 (resolution ≦ 280 nm).