概述

The UltraTech 1100 is a stepper system that is used to transfer reticle images onto wafers. It can handle wafers that are between 3" and 6" in size and has a resolution of 1.0 microns. The system uses a broadband alignment system that includes both “G” and “H” lines and has the option for either WAS key and target automation or an intelligent autoloader. Additionally, the UltraTech 1100 features air probe edge switches and is equipped with an HP 362 computer that includes a hard disk.