AST Juchang Technology PEVA series high-end precision electron beam evaporation system is aimed at metal electrodes, transparent conductive films (ITO) and optical films of Power IC (Ti /Ni/Ag), LED (Cr/Pt/Au) and MEMS, etc. (SiO2/Ti3O5) designed batch production equipment, with a unique vapor deposition reaction chamber design, can provide higher production capacity, and more accurate and reliable process requirements.

AST Juchang Technology has always been full of infinite ideals and enthusiasm for the optoelectronic semiconductor equipment industry.Thin film process: (1) E-Beam Evaporator (Electron Beam Evaporator), (2) Resistance Heating Evaporator (Resistance Heating Evaporator). Etching process: (1) TCP-RIE (High Density Plasma Reactive Ion Etching Equipment), (2) RIE (Reactive Ion Etching Equipment).

PEVA-900E

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