概述

AST Juchang Technology PEVA series high-end precision electron beam evaporation system is aimed at metal electrodes, transparent conductive films (ITO) and optical films of Power IC (Ti /Ni/Ag), LED (Cr/Pt/Au) and MEMS, etc. (SiO2/Ti3O5) designed batch production equipment, with a unique vapor deposition reaction chamber design, can provide higher production capacity, and more accurate and reliable process requirements.