概述

The Kurt J. Lesker Company® NANO 36™ is our optimized, entry level deposition system. Our chamber design is uniquely suited for glovebox integration. With increased capabilities and a smaller footprint, the NANO 36 provides an accessible price point while maintaining the quality you expect from KJLC. The NANO 36 is compatible with the following deposition techniques: Thermal Evaporation (up to four 2" boat assemblies). Torus® Magnetron Sputtering sources (up to three 2" or 3" sources). 1cc or 10cc LTE Organic deposition sources (up to four). Combination of two Thermal and two LTE sources. Custom configurations are available upon request.