BROOKS AUTOMATION

MTX 2000

MTX2000/2

Brooks Automation Reliance ATR8 Wafer Transfer Robot

ATR-8

FIXLOAD 6M	

MTX 4000	

PRE 200

The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job: to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency while delivering industry-leading cleanliness with the lowest particle levels.

Ease of set-up and serviceability are key attributes of the Spartan Sorter. Its simple, scalable architecture is easy to service and maintain. Fully compliant with SEMI standards, the Spartan Sorter is available in several options to support various sorting applications.

Spartan Sorters

FIXLOAD 6"

002-7200-21

DBM 2406

MULTITRAN 5

MAGNATRAN 70

FIXLOAD 25

APS 2000

152465

121655

ABM407B

FIXLOAD V6

108446

300mm Front Opening Unified Pod (FOUP) loadport

002-7200-20

MX400

S9 JET

The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.

BROOKS AUTOMATION

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热门 BROOKS AUTOMATION Wafer Handling

MTX 2000

MTX2000/2

ATR-8

FIXLOAD 6M

使用 Moov 上架，立即找到完美买家。

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