
说明
Double Side Polisher/Lapper配置
Plate Radius (Outer, Inner, Thickness): (1060 x 296, 50) mm Rotational Speed (rpm): 4~52 CARRIER: M=3, Z=154, PCD=462 Dimensions (L x W x H): 2250 x 1530 x 2710 mm Weight: 4600 kgOEM 型号描述
未提供文件
无文件
PREFERRED
SELLER
SPEEDFAM
18B-5
类别
Wafer Polishing
上次验证: 30 天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
123135
晶圆尺寸:
未知
年份:
1998
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Refurbishment Services
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说明
Double Side Polisher/Lapper配置
Plate Radius (Outer, Inner, Thickness): (1060 x 296, 50) mm Rotational Speed (rpm): 4~52 CARRIER: M=3, Z=154, PCD=462 Dimensions (L x W x H): 2250 x 1530 x 2710 mm Weight: 4600 kgOEM 型号描述
未提供文件
无文件