概述

Flexible Solution for Aqueous Development and Cleaning SUSS MicroTec’s semi-automated wet-processing system AD12 offers superior cleaning and developing functions for aqueous media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm. Its ability to handle various media and processes gives the flexibility needed for switching between applications and makes the tool first choice for research environment and small scale production.