概述

The Bcube series of wet cleaning and etching equipment provides excellent process results for manufacturing MEMS, LEDs, and power semiconductors. Applicable processes include pre-cleaning, PR strip, RCA clean, pre-epi clean de-glue cleaning, pre- / post- diffusion cleaning, and various etching process steps. Systems are available for a variety of substrate materials including Si, SiC, Germanium, Aluminum oxide and III-IV compound semiconductors.