说明
FEOL CLEAN Hardware (Fab) : System Type Description Quantity Status Others Hardware (Subfab / Auxilliary Units) Description Qty Status MKS PrimO3 1 OK Fire System 1 OK Missing/Faulty Parts / Accessories List Description Qty DIABLED CHAMBERS 12/12/22 6配置
CIM: SECS/GEMS Process: FEOL CLEAN Software Version: V2_411STD01OEM 型号描述
The AQUASPIN SU-3200 single wafer cleaning system is able to spray chemical to achieve individual wafer cleaning.文件
SCREEN / DNS / DAINIPPON SCREEN
SU-3200
已验证
类别
Wet Benches - Auto
上次验证： 9 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116588
晶圆尺寸：
12"/300mm
年份：
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SCREEN / DNS / DAINIPPON SCREEN
SU-3200
类别
Wet Benches - Auto
上次验证： 9 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116588
晶圆尺寸：
12"/300mm
年份：
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available