The AQUASPIN SU-3300 single wafer cleaning system delivers industry-leading productivity and high processing performance.

Screen Semiconductor offers a variety of products throughout the semiconductor manufacturing processes: Screen offer tools for the following processes: Wafer cleaning system, measurement system, coat/develop track, inspection system, annealing system, and advanced packaging lithography.

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SU-3300

8CH Process Modules -1 ( Center Robot )
8CH Process Modules -2 ( EFEM Aligner )
FOUP / EFEM Modules
H₂O₂ Supply / Delivery Module
IPA Dry Module -1
IPA Dry Module -2
Oxide Removal Chemical Cabinet
Standard Clean 1 Chemical Cabinet
TBE Chemical Cabinet

SU-3300

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SU-3300

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