概述

The GALAXY platform combines years of experience in batch wafer processing with the cutting edge of process control typically only found on single wafer tools. It can grow with process needs suitable for prototyping as well as for mass production. Solvent, acid or Ozone processing is possible. The modular design allows single chamber semi-manual tools up to multiple chambers fully automated platform – manual cassette loading and change over to guardian carriers for full automation is possible. By changing the carrier, different substrate sizes can be processed.