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SS-3000(2+2) With HDD, no missing part, de-installed by OEM配置
[Chamber A] Process : Wafer surface clean Chuck : Vacuum Chuck SPRAY : Soft Spray N2 10~100NL/min Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 3000rpm Spin Dry only [Chamber B] Process : Wafer surface clean Chuck : Vacuum Chuck SPRAY : Soft Spray N2 10~100NL/min Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 3000rpm Spin Dry only [Chamber C] Process : Wafer Backside clean Chuck : Mechanical Chuck SPRAY : Soft Spray N2 10~200NL/min Burush : PVA Burush Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 2400rpm Spin Dry only [Chamber D] Process : Wafer Backside clean Chuck : Mechanical Chuck SPRAY : Soft Spray N2 10~200NL/min Burush : PVA Burush Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 2400rpm Spin Dry onlyOEM 型号描述
Wafer Scrubber文件
类别
Wafer Scrubber
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Uncrated
产品编号：
92749
晶圆尺寸：
12"/300mm
年份：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SCREEN / DNS / DAINIPPON SCREEN
SS-3000-AR
类别
Wafer Scrubber
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Uncrated
产品编号：
92749
晶圆尺寸：
12"/300mm
年份：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available