Single-wafer cleaning system for 300mm wafers.
The AQUASPIN MP-3000 will be used for 0.13 μm and even precise cleaning processes,
supporting the finer design rules of advanced device technology.

Screen Semiconductor offers a variety of products throughout the semiconductor manufacturing processes: Screen offer tools for the following processes: Wafer cleaning system, measurement system, coat/develop track, inspection system, annealing system, and advanced packaging lithography.

SCREEN / DNS / DAINIPPON SCREEN

MP-3000

MP-3000.pdf

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SCREEN : DNS : DAINIPPON SCREEN MP-3000.pdf

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MP-3000

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