Scepter SAT
概述
During 2000 Semitool introduced Scepter line of spray solvent tools and rinser/dryers. The Scepter products have double the wafer capacity of our standard SST and rinser/dryers while using approximately the same amount of clean room space. This allows an existing fab the ability to increase throughput without adding space. The Scepter is designed for wafers up to 300mm in size.
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