说明
Tool Status: Online配置
Process: XRD_Bruker Software Version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Chamber Components: Tool's Recipe Capability Multiple Recipe Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed BEOL,FEOL,HK,MOL,N2BEOEM 型号描述
The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.文件
无文件
BRUKER
D8 FABLINE
已验证
类别
X-Ray / XRD / XRF
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
105054
晶圆尺寸：
12"/300mm
年份：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BRUKER
D8 FABLINE
类别
X-Ray / XRD / XRF
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
105054
晶圆尺寸：
12"/300mm
年份：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Tool Status: Online配置
Process: XRD_Bruker Software Version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Chamber Components: Tool's Recipe Capability Multiple Recipe Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed BEOL,FEOL,HK,MOL,N2BEOEM 型号描述
The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.文件
无文件