说明
Dry etch system配置
Known issues: Not included: (Qty 2) LPT Dry Pump VHP Robot Handler Process: METAL ETCHER Software Version: E4.7_25OEM 型号描述
In September 1992, AMAT announced the Centura Poly, a single-wafer, multichamber platform targeted at the high-temperature thin film deposition of polysilicon on wafers up to 200mm (8 inch) in diameter.文件
无文件
类别
ALD
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154782
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
CENTURA POLY
类别
ALD
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154782
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Dry etch system配置
Known issues: Not included: (Qty 2) LPT Dry Pump VHP Robot Handler Process: METAL ETCHER Software Version: E4.7_25OEM 型号描述
In September 1992, AMAT announced the Centura Poly, a single-wafer, multichamber platform targeted at the high-temperature thin film deposition of polysilicon on wafers up to 200mm (8 inch) in diameter.文件
无文件