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说明
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PEALD, 4 chambersOEM 型号描述
Plasma enhanced atomic layer deposition文件
无文件
ASM
EAGLE XP5
类别
ALD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
70722
晶圆尺寸：
未知
年份：
未知
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说明
无说明配置
PEALD, 4 chambersOEM 型号描述
Plasma enhanced atomic layer deposition文件
无文件