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3 reactors ASM Eagle XP8 Plasma Enhanced ALD Tool配置
XP8 Platform Front and rear Operations/Maintenance Touch Screen with pen Loader module transfer robot and controller with 3 load ports. 2 Load locks Wafer cooling chamber Four BOC Edwards dry pump (subject to availability) Exhausted gas box with 8 MFC capability per chamber 2 RF generators and controller per chamber Remote plasma cleaning (RPU) per chamber Two RF matchers per chamberOEM 型号描述
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.文件
ASM
EAGLE XP8
类别
ALD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
101682
晶圆尺寸：
12"/300mm
年份：
未知
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