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No warranty Spares Ethanol tank- 1 Trap tank - 1 RF Generator ENI - OEM 1250- 1 Transfer Module/Process Module Computer- 1 CTC Computer- 1 Brooks Power Supply- 1 Bay Voltex HREHT-0650-DC-G- 1配置
Process- MOCVD Ta(OC2H5)5 Operating System- Windows XP Professional Platform Model- Brooks MX700 Process Module- 2 Wafer Transfer Robot- Brooks MagnaTran™ 7.1 Transfer Robot Arm- Leap Frog GEM/SECS Interface- HSMS Heat Exchanger- Bay Voltex HREHT-0650-DC-G RF Generator- ENI - OEM 1250 Vaccum Load Lock- Brooks VCE 6 Vacuum Cassette Elevator SMIF- ASYST SMIF LPI 2200 Vacuum Pump - Process pump - Ebara EVM202NBE LDS pump - EVS100P Load lock pump - Kashiyama TS310X Transfer Module pump - Kashiyama TS310X GRC- Edward D150 Dual Gas Reactor Column LDS System- Y Fire Distinguisher System- Y MFC Argon (Horiba)- 300SCCM Argon (Horiba)- 5000SCCM Argon (Horiba)- 1000SCCM O2 (Horiba)- 500SCCM SF6 (UNIT)- 500SCCM LFM - (OC2H5)5 (Horiba)- 0.1g/minOEM 型号描述
未提供文件
类别
ALD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
113491
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
JUSUNG
EUREKA 2000
类别
ALD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
113491
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available