说明
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based Binning配置
无配置OEM 型号描述
未提供文件
无文件
类别
AOI
上次验证： 8 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153745
晶圆尺寸：
未知
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
Altair 8920i
类别
AOI
上次验证： 8 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153745
晶圆尺寸：
未知
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based Binning配置
无配置OEM 型号描述
未提供文件
无文件