说明
ETCH配置
ES3I 2 ChamberOEM 型号描述
The new FusionES3i system supports nearly all dry-strip requirements for copper, low-k dielectric, deep trench and vias, and other applications in a single tool. Second generation 300mm photoresist strip system.文件
无文件
类别
Ashers / Plasma Cleaner
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123709
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AXCELIS / FUSION
FUSION ES3i
类别
Ashers / Plasma Cleaner
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123709
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
ETCH配置
ES3I 2 ChamberOEM 型号描述
The new FusionES3i system supports nearly all dry-strip requirements for copper, low-k dielectric, deep trench and vias, and other applications in a single tool. Second generation 300mm photoresist strip system.文件
无文件