说明
Backside Usher配置
无配置OEM 型号描述
Plasma Mode: RIE / DP mode changeable Electrode Structure: Parallel flat stage RF Power MAX.: 500W Oscillation Frequency: 13.56MHz Quartz Oscillator Display: LED touch panel Chamber Dimensions: W500 × D300 × H200mm Stage Size: W400 × D200mm Chamber Material: Aluminium Reaction Gas: 2 systems（Ar, O2） Purge Gas: N2 or Dry air Reaction Gas Flow Control: Mass flow controller文件
无文件
YAMATO SCIENTIFIC
PDC510
已验证
类别
Ashers / Plasma Cleaner
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
71182
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
YAMATO SCIENTIFIC
PDC510
类别
Ashers / Plasma Cleaner
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
71182
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Backside Usher配置
无配置OEM 型号描述
Plasma Mode: RIE / DP mode changeable Electrode Structure: Parallel flat stage RF Power MAX.: 500W Oscillation Frequency: 13.56MHz Quartz Oscillator Display: LED touch panel Chamber Dimensions: W500 × D300 × H200mm Stage Size: W400 × D200mm Chamber Material: Aluminium Reaction Gas: 2 systems（Ar, O2） Purge Gas: N2 or Dry air Reaction Gas Flow Control: Mass flow controller文件
无文件