说明
Cleaning Side Only - Polishing Side Not Included Details attached配置
Walking Beam Assembly Input Station Transfer Robot: Brooks Model: WTM-511-2-FWS02-V1-CU Delivery Tank: Megasonic Tank Megasonics Delivery Type: 2 x Pressurized Vessel Megasonic Generator: 600W 2ea Megasonic Heater Brush 1 Delivery: Pressurized Vessel Brush 2 Delivery: Pressurized Vessel Heater Lamp SRD Exhaust & Drain Lines: Single Output station SRD Finger Orion ControllerOEM 型号描述
The Applied Reflexion CMP system is Applied Materials' 300mm CMP platform delivering innovation and productivity for 100nm and beyond. Based on the production-proven Applied Mirra Mesa CMP architecture, the Applied Reflexion system offers 300mm processing capabilities for oxide, STI, polysilicon, tungsten, and copper applications. Titan Head technology delivers excellent dishing and erosion performance with better repeatability. The system's FullScan endpoint system enables superior process results by scanning the entire wafer. Applied Reflexion's cleaner offers a two-stage brush scrub with single-wafer megasonics in vertical orientation to minimize footprint. Its space efficient design also features factory automation and advanced process control with integrated film thickness metrology and particle monitoring options, as well as a dual wafer robot which increases tool throughput for thin films.文件
APPLIED MATERIALS (AMAT)
REFLEXION
已验证
类别
CMP
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
104465
晶圆尺寸：
12"/300mm
Robot:
Brooks Automation: WTM-511-2-FWS02-V1-CU
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
REFLEXION
类别
CMP
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
104465
晶圆尺寸：
12"/300mm
Robot:
Brooks Automation: WTM-511-2-FWS02-V1-CU
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available