说明
Only ever had silicon slurry and SC1 chemistry aboard配置
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
无文件
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EBARA
F-REX300
类别
CMP
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
127105
晶圆尺寸：
12"/300mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Only ever had silicon slurry and SC1 chemistry aboard配置
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
无文件