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说明
Only ever had silicon slurry and SC1 chemistry aboard配置
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
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EBARA
F-REX300
类别
CMP
上次验证： 21 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
127105
晶圆尺寸：
12"/300mm
年份：
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Only ever had silicon slurry and SC1 chemistry aboard配置
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
无文件