说明
Multi-Process CMP配置
无配置OEM 型号描述
MOMENTUM is a high-throughput, dry-in/dry-out CMP system for all 200mm-wafer process applications. Designed with extendibility to accommodate future reductions in line widths, the MOMENTUM has four independent wafer-polishing platens that allow for maximum manufacturing flexibility. It also employs a patented orbital polishing motion that minimizes surface dishing and erosion and a slurry delivery system that results in more efficient consumption of polishing chemicals.文件
无文件
类别
CMP
上次验证： 18 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147705
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NOVELLUS / SpeedFam-IPEC
MOMENTUM
类别
CMP
上次验证： 18 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147705
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Multi-Process CMP配置
无配置OEM 型号描述
MOMENTUM is a high-throughput, dry-in/dry-out CMP system for all 200mm-wafer process applications. Designed with extendibility to accommodate future reductions in line widths, the MOMENTUM has four independent wafer-polishing platens that allow for maximum manufacturing flexibility. It also employs a patented orbital polishing motion that minimizes surface dishing and erosion and a slurry delivery system that results in more efficient consumption of polishing chemicals.文件
无文件