说明
The device is disassembled and stored in a warm and dry warehouse. Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity (depending on configuration and layer structure): up to 1200 substrates per hour Cycle time: < 3 seconds Dimensions and weight of the system: Main system dimensions: L × W × H [cm] = 335 × 225 × 155 Main system weight: 3.3 t Media supply: Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen High voltage Compressed air Cooling water配置
无配置OEM 型号描述
未提供文件
无文件
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
134375
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
SOLARIS S151
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
134375
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
The device is disassembled and stored in a warm and dry warehouse. Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity (depending on configuration and layer structure): up to 1200 substrates per hour Cycle time: < 3 seconds Dimensions and weight of the system: Main system dimensions: L × W × H [cm] = 335 × 225 × 155 Main system weight: 3.3 t Media supply: Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen High voltage Compressed air Cooling water配置
无配置OEM 型号描述
未提供文件
无文件