说明
Still in use in cleanroom. Complete and operational.配置
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEM 型号描述
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameter文件
无文件
EVGroup (EVG)
EVG150
已验证
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
96201
晶圆尺寸：
4"/100mm
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVGroup (EVG)
EVG150
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
96201
晶圆尺寸：
4"/100mm
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Still in use in cleanroom. Complete and operational.配置
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEM 型号描述
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameter文件
无文件