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无说明配置
Manually loading Photoresist Spin CoaterOEM 型号描述
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.文件
无文件
SOLITEC
5110C
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
56476
晶圆尺寸：
未知
年份：
1998
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说明
无说明配置
Manually loading Photoresist Spin CoaterOEM 型号描述
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.文件
无文件