说明
Clean Track Lithius Pro - Coater / Developer配置
Details Attached Main Configuration: Carrier Station (Loader) Process Block (Coater/Developer Cups) COT Cabinet (Coater Chemical Cabinet) DEV Cabinet (Developer Chemical Cabinet) Dev Cabinet Coater (QTY 6) Developer (QTY 9)OEM 型号描述
The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.文件
类别
Coaters & Developers
上次验证： 3 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
Deinstalled
产品编号：
155171
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LITHIUS Pro
类别
Coaters & Developers
上次验证： 3 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
Deinstalled
产品编号：
155171
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available