说明
4C/4D配置
PH_ArFOEM 型号描述
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).文件
无文件
类别
Coaters & Developers
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
144749
晶圆尺寸：
12"/300mm
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
LITHIUS
类别
Coaters & Developers
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
144749
晶圆尺寸：
12"/300mm
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
4C/4D配置
PH_ArFOEM 型号描述
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).文件
无文件