说明
无说明配置
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEM 型号描述
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TEL / TOKYO ELECTRON
MB2 730HT
已验证
类别
CVD (Metalization)
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
28938
晶圆尺寸:
8"/200mm
年份:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部TEL / TOKYO ELECTRON
MB2 730HT
类别
CVD (Metalization)
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
28938
晶圆尺寸:
8"/200mm
年份:
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEM 型号描述
未提供文件
无文件