说明
PVD system配置
Main Frame DAMA Clean MAG7 Robot Handler (Qty 2) SMIF Factory Interface Process: HCM CUOEM 型号描述
The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.文件
无文件
类别
CVD
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154823
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
INOVA
类别
CVD
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154823
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
PVD system配置
Main Frame DAMA Clean MAG7 Robot Handler (Qty 2) SMIF Factory Interface Process: HCM CUOEM 型号描述
The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.文件
无文件