说明
DARK FIELD配置
无配置OEM 型号描述
IS3000 is a state-of-the-art dark-field type inspection system for detecting wafer pattern defects. While maintaining high throughput—the advantage of a dark-field-type defect-detection inspection device—the IS3000 is a ground-breaking detection device that surpasses conventional darkfield types in that it can also detect parts of shape defects and foreign bodies in places other than the top wafer surface (such as between interconnections and in contact holes).文件
无文件
HITACHI
IS-3000
类别
Defect Inspection
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127400
晶圆尺寸：
未知
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
DARK FIELD配置
无配置OEM 型号描述
IS3000 is a state-of-the-art dark-field type inspection system for detecting wafer pattern defects. While maintaining high throughput—the advantage of a dark-field-type defect-detection inspection device—the IS3000 is a ground-breaking detection device that surpasses conventional darkfield types in that it can also detect parts of shape defects and foreign bodies in places other than the top wafer surface (such as between interconnections and in contact holes).文件
无文件