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说明
Defect Review (SEM)配置
2 LP+1 ChamberOEM 型号描述
The eDR-5200 features a lens system that delivers a significant improvement in resolution, meeting production and process development requirements for advanced design-rule semiconductor devices. Unique connectivity technology between the eDR-5200 and our market-leading inspection systems provides additional benefits to our customers with respect to defect redetection, classification and speed.文件
无文件
KLA
eDR-5200
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
62883
晶圆尺寸：
12"/300mm
年份：
2010
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Money Back Guarantee
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Refurbishment Services
Available
说明
Defect Review (SEM)配置
2 LP+1 ChamberOEM 型号描述
The eDR-5200 features a lens system that delivers a significant improvement in resolution, meeting production and process development requirements for advanced design-rule semiconductor devices. Unique connectivity technology between the eDR-5200 and our market-leading inspection systems provides additional benefits to our customers with respect to defect redetection, classification and speed.文件
无文件