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说明
DRSEM配置
DRSEMOEM 型号描述
In July 2009 KLA introduced the eDR-5210, an e-beam review and classification system that features second-generation electromagnetic-field immersion technology, engineered to deliver very high quality images and, consequently, accurate defect classification results.文件
无文件
KLA
eDR-5210
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
22384
晶圆尺寸：
12"/300mm
年份：
2010
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说明
DRSEM配置
DRSEMOEM 型号描述
In July 2009 KLA introduced the eDR-5210, an e-beam review and classification system that features second-generation electromagnetic-field immersion technology, engineered to deliver very high quality images and, consequently, accurate defect classification results.文件
无文件