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说明
Frame配置
无配置OEM 型号描述
The eV300 defect review system, an advanced, automated SEM designed to gather defect excursion information, analyze and report the results with the improved sensitivity required at smaller design rules. The eV300 supplements optical review by providing topographical information, enabling more accurate defect classification than can be achieved by optical review systems alone.文件
KLA
eV300
类别
Defect Inspection
上次验证： 30 多天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
124111
晶圆尺寸：
未知
年份：
未知
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