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说明
KLA 2139-UI User Interface Console Inspection Station Diagnose Monitor Interface Power Line Conditioner Exhaust Fan Box SAT (Segmented Auto threshold) MMED Quest Direct link Direct SECS Full wafer inspection Tool can inspect the blank and pattern 8inch wafer, GRR<l0% (Fab 2139 PCCB spec). Defect Review System can review and classify the defects after inspection. All defects should be real defects and in the blue box. And tool should also has Clustering/Sampling/Sorting function. Stage and Chuck: 8 inch (200mm) low contact chuck Y stage using Stepper motor X stage using linear motor and X Slider with air bearing Theta and Z Stage using ECS Temperature: 20-25°C CDA: 80PSI Electricity: AC 208V / 3 phase/ Frequency S0Hz配置
无配置OEM 型号描述
The 2139 wafer inspection system offers sensitivity and productivity enhancements for IC manufacturers. It is available as an independent tool or as an upgrade to existing 2135 and 2138 tools, allowing manufacturers to extend the life of their current KLA-Tencor tools. The 2139 is based on KLA-Tencor’s proven image processing technology and includes features such as ultra-broadband illumination and Segmented Auto Threshold technology. It is also available with an integrated SMIF mini-environment.文件
KLA
2139
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
89679
晶圆尺寸：
8"/200mm
年份：
2001
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Refurbishment Services
Available