出售二手 KLA AIT UV

说明

Damaged parts： 1.Robot-ABM407 2.Track motor

配置

-Asset HDD not included -HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED. -Loading Configuration: FOUP -Number of Cassette/FOUP Positions: 2 -Software Version: 6.3.89.5 -Electrical Requirements: NA -Is System On-Line?: No -Off-Line Date (if applicable): 2019 -CE Mark Certified? : No -Date of Last PM: No -Date of Last Laser Change: NA -OEM Audit Available?: No -Can Produce Wafers AS IS?: No -Any Known Field Modifications?: No -All Cables Present?: NA System Configuration: -Main Platform: Fusion UV Key Common Options: -Clean Room Manuals: No -Standard Manuals: No -External Panels (Skins): Cleanroom White -Chuck Type: Universal Ceramic / Other -GEM/SECS Interface: Yes AIT LUV Series Options: -Hierarchical Load Adaptive Thresholding (HLAT): No -Auto-Positioning System: No -iADC Processor: No Internal Review – Optical Microscope: -Spot Optics (um): 3.5 um, 6 um External Support Equipment: -Laser Power Supply: Yes -Image Computer: Yes -Blower Box: Yes -Number of Blower Boxes: 1 -Chiller Make/Model: KLA PILLAR -The equipment include ISO loadport*2 & Wafer handler*1 & Inspection unit*1 & Line conditioner*1

OEM 型号描述

AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.