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说明
KLA-Tencor AIT-XP+ ( Upgraded from AIT XP ) *. Fully refurbished. *. Installed in Clean-room. *. Can demonstrate any time.配置
Working . CE marked . Single open cs sette handler . Image Computer . OS : Microsoft Windows NT 4.0 . Application S/W : Version 6.3.24.3 ( Build Time 2006.8 ) . Laser: 75mW 488nm argon ion laser . (3) Collection Channels . Spot Size 7um, 5um, 3.5um . Internal Microscope Review - Microscope review Objectives 10x, 50x, 100x, 150x - Bright / Dark Field View - AutoFocus Capability . Brooks Robot and pre aligner . Blower Unit . KLARF Output File Facility Requirements: - CDA : 1/4" , min 90psi - Vacuum : 1/4" 20-in Hg - Power . (Main): 208VAC, 3-Phase, 4-Wire, Freq 50/60Hz . (Image computer): 208VAC, 3-Phase, -4 Wire, Freq 50/60HzOEM 型号描述
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无文件
KLA
AIT XP+
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
65990
晶圆尺寸：
8"/200mm
年份：
2000
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说明
KLA-Tencor AIT-XP+ ( Upgraded from AIT XP ) *. Fully refurbished. *. Installed in Clean-room. *. Can demonstrate any time.配置
Working . CE marked . Single open cs sette handler . Image Computer . OS : Microsoft Windows NT 4.0 . Application S/W : Version 6.3.24.3 ( Build Time 2006.8 ) . Laser: 75mW 488nm argon ion laser . (3) Collection Channels . Spot Size 7um, 5um, 3.5um . Internal Microscope Review - Microscope review Objectives 10x, 50x, 100x, 150x - Bright / Dark Field View - AutoFocus Capability . Brooks Robot and pre aligner . Blower Unit . KLARF Output File Facility Requirements: - CDA : 1/4" , min 90psi - Vacuum : 1/4" 20-in Hg - Power . (Main): 208VAC, 3-Phase, 4-Wire, Freq 50/60Hz . (Image computer): 208VAC, 3-Phase, -4 Wire, Freq 50/60HzOEM 型号描述
未提供文件
无文件