The Surfscan 6100 is a tool that is capable of detecting defects on a surface. It can locate, measure the size of, and count the number of defects that are as small as 0.157 micrometers in size. Additionally, it has a high capture rate of 95%, meaning it can accurately detect the vast majority of defects present on a surface.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

SURFSCAN 6100

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