说明
Wafer Inspection System配置
- Software version: NGS 5.4 SR03 HF03 - Power rating: 208V3W-N - Loading configuration: 3 - Possible damage to chuck area due to a wafer breakage event - HDD removedOEM 型号描述
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.文件
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KLA
SURFSCAN SP2
已验证
类别
Defect Inspection
上次验证: 30 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
100909
晶圆尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部KLA
SURFSCAN SP2
类别
Defect Inspection
上次验证: 30 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
100909
晶圆尺寸:
12"/300mm
年份:
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer Inspection System配置
- Software version: NGS 5.4 SR03 HF03 - Power rating: 208V3W-N - Loading configuration: 3 - Possible damage to chuck area due to a wafer breakage event - HDD removedOEM 型号描述
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.文件
无文件