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市场 > Defect Inspection > KLA > VisEdge CV300

VisEdge CV300

概述

To help customers identify and fix these edge-related yield issues, KLA-Tencor introduced the VisEdge™ CV300, in October 2006. The tool’s unique optics design and advanced defect classification capabilities allow IC manufacturers to capture a wide range of wafer-edge defect types with high sensitivity.

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