说明
Macro-Defect配置
无配置OEM 型号描述
The 2401 Automated Macro Defect Inspection System is a product by KLA-Tencor that replaces manual bright light macro defect inspection performed by operators. It provides automated detection, classification, and reporting of all yield-critical macro after-develop inspection defect types, including hotspots, scratches, large particles, extra and missing resist, unexposed fields, striations, developer spots and splashback. With sensitivity superior to that of operators, the 2401 Automated Macro Defect Inspection System detects defects reliably and repeatably, allowing for quick and accurate disposition decisions, reducing scrap and preventing further investment in low-yielding wafers.文件
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KLA
2401
类别
Defect Inspection
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
119860
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Macro-Defect配置
无配置OEM 型号描述
The 2401 Automated Macro Defect Inspection System is a product by KLA-Tencor that replaces manual bright light macro defect inspection performed by operators. It provides automated detection, classification, and reporting of all yield-critical macro after-develop inspection defect types, including hotspots, scratches, large particles, extra and missing resist, unexposed fields, striations, developer spots and splashback. With sensitivity superior to that of operators, the 2401 Automated Macro Defect Inspection System detects defects reliably and repeatably, allowing for quick and accurate disposition decisions, reducing scrap and preventing further investment in low-yielding wafers.文件
无文件