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说明
There are two loading ports. One is for 300mm FOUP & FOSB and another is for 200mm FOUP and Open cassette配置
无配置OEM 型号描述
The eDR7280 is an electronbeam wafer defect review and classification system that utilizes improved imaging and automatic defect classification capability to identify detected defects and produce an accurate representation of the detected defect population.文件
KLA
eDR-7280
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
111650
晶圆尺寸：
未知
年份：
2016
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Refurbishment Services
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