说明
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..配置
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEM 型号描述
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.文件
无文件
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
65986
晶圆尺寸：
8"/200mm
年份：
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN 6200
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
65986
晶圆尺寸：
8"/200mm
年份：
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..配置
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEM 型号描述
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.文件
无文件