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说明
Semilab WT-2020 (u-PCR) Carrier life time measurement配置
■ System Configuration . WT2020 main unit with scanning capability . Dual PC : DOS PC & Window PC . μ-PCR head for lifetime measurements . Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC ) . Vacuum pump . Utility : - Power : 220V or 115V, 50/60Hz - Vacuum : 1/4" 0.2 ~0.5 bar ■ Hadware Function Capability . μ-PCD measurement (904 nm Laser) . Laser Power Feedback . AUX Laser (Option) : 500 mW, 349nm . Others ■ Application . Monitoring defects and contamination ( bulk and surface region of Si wafer) . Characterization of thin film samples ■ Measurement . Carrier Lifetime Measurement ( μ-PCD/μ-PCD ) . High resolution mapping and discrete point measurements . Characterization of thin film samplesOEM 型号描述
未提供文件
无文件
SEMILAB
WT-2020
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
66030
晶圆尺寸：
8"/200mm
年份：
2018
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说明
Semilab WT-2020 (u-PCR) Carrier life time measurement配置
■ System Configuration . WT2020 main unit with scanning capability . Dual PC : DOS PC & Window PC . μ-PCR head for lifetime measurements . Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC ) . Vacuum pump . Utility : - Power : 220V or 115V, 50/60Hz - Vacuum : 1/4" 0.2 ~0.5 bar ■ Hadware Function Capability . μ-PCD measurement (904 nm Laser) . Laser Power Feedback . AUX Laser (Option) : 500 mW, 349nm . Others ■ Application . Monitoring defects and contamination ( bulk and surface region of Si wafer) . Characterization of thin film samples ■ Measurement . Carrier Lifetime Measurement ( μ-PCD/μ-PCD ) . High resolution mapping and discrete point measurements . Characterization of thin film samplesOEM 型号描述
未提供文件
无文件