说明
ETCH配置
2CH,CERTAS_WING type,5gas linesOEM 型号描述
Certas WING™ is the 2nd generation plasma-free gas chemical etch system from Tokyo Electron targeted at selective oxide film etching. Productivity of the new tool has been improved with twice the throughput while maintaining the same footprint. The Certas WING™ process capability has been expanded to achieve higher etch volumes and provide flexibility for etching of a wider variety of silicon based films that will be used in future semiconductor device manufacturing.文件
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TEL / TOKYO ELECTRON
Certas WING
已验证
类别
Dry Etch
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
95967
晶圆尺寸:
12"/300mm
年份:
2008
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部TEL / TOKYO ELECTRON
Certas WING
类别
Dry Etch
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
95967
晶圆尺寸:
12"/300mm
年份:
2008
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
ETCH配置
2CH,CERTAS_WING type,5gas linesOEM 型号描述
Certas WING™ is the 2nd generation plasma-free gas chemical etch system from Tokyo Electron targeted at selective oxide film etching. Productivity of the new tool has been improved with twice the throughput while maintaining the same footprint. The Certas WING™ process capability has been expanded to achieve higher etch volumes and provide flexibility for etching of a wider variety of silicon based films that will be used in future semiconductor device manufacturing.文件
无文件