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Description Dimension Qty Main Frame 87 X 98 X 91 1 Rorze Factory Interface 78 X 29 X 66 1 System Controller 26 X 42 X 69 1 Generator Rack 44 X 36 X 69 1 A/C Rack 20 X 36 X 68 1 AMAt HX 20 X 25 X 36 1 Steelhead Heat Exchanger 22 X 39 X 35 1 Neslab HX-150 22 X 29 X 35 1 Hoist Frame 69 X 32 X 9 1 Hoist Drive Assembly 52 X 20 19 1 Monitor Rack, Tall 23 X 25 X 72 1 Tote #1, (Large Pallet Tote) 41 X 49 X 37 1 Tote #2, (Large Pallet Tote) 41 X 49 X 37 1 Tote #3, (Small Tote) 22 X 29 X 15 1 Gas Panel Upper 78 X 11 X 14 1 Monitor/Endpoint rack 22 X 26 X 54 1 Tote #4 (Blue tote) 22 X 28 X 18 1配置
无配置OEM 型号描述
The AMAT Centura DPS is a highly efficient semiconductor processing system with a unique architecture that groups four processing stations and two auxiliary chambers around a central transfer module housing an ultra-reliable magnetically-coupled vacuum robot. It is designed for ≤200mm wafer fabrication and supports various applications such as Chemical Vapor Deposition (CVD), epitaxy, etch, plasma nitridation, and Rapid Thermal Processing (RTP).文件
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127806
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA DPS
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127806
晶圆尺寸：
8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available