说明

Description Dimension Qty Main Frame 87 X 98 X 91 1 Rorze Factory Interface 78 X 29 X 66 1 System Controller 26 X 42 X 69 1 Generator Rack 44 X 36 X 69 1 A/C Rack 20 X 36 X 68 1 AMAt HX 20 X 25 X 36 1 Steelhead Heat Exchanger 22 X 39 X 35 1 Neslab HX-150 22 X 29 X 35 1 Hoist Frame 69 X 32 X 9 1 Hoist Drive Assembly 52 X 20 19 1 Monitor Rack, Tall 23 X 25 X 72 1 Tote #1, (Large Pallet Tote) 41 X 49 X 37 1 Tote #2, (Large Pallet Tote) 41 X 49 X 37 1 Tote #3, (Small Tote) 22 X 29 X 15 1 Gas Panel Upper 78 X 11 X 14 1 Monitor/Endpoint rack 22 X 26 X 54 1 Tote #4 (Blue tote) 22 X 28 X 18 1

配置

无配置

OEM 型号描述

The AMAT Centura DPS is a highly efficient semiconductor processing system with a unique architecture that groups four processing stations and two auxiliary chambers around a central transfer module housing an ultra-reliable magnetically-coupled vacuum robot. It is designed for ≤200mm wafer fabrication and supports various applications such as Chemical Vapor Deposition (CVD), epitaxy, etch, plasma nitridation, and Rapid Thermal Processing (RTP).