APPLIED MATERIALS (AMAT) Centris AdvantEdge G5 Mesa Poly

说明

No HDD

配置

Etch Process - 52L Staircase etch ➢ 6 Chamber, 4 Loadports ➢ Gases Used: Cl2,HBr,CHF3,SiCl4,CH4,SF6,O2,N2,SF6,Ar,He,CF4 ➢ ASSEMBLY, SERVER CORE SM-1U-2.83-1.5TB-500GB-HWR-DPNIC ➢ ASSEMBLY, SERVER FES SM 1U 2.33-8GB-500GB HWR SERIAL IPMI ➢ ASSEMBLY, SERVER E3 SM-1U-DUAL2.4-36GB-1.2TB.10K-HWR ➢ ASSEMBLY, SERVER RTS_TCS SM-1U-2.33-2GB-160GB-HWR ➢ Red/Amber/Green/Blue ( Front) DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG ➢ SPECIFICATION, CR SELOP7 LOADPORT, 5.X FI ➢ KIT, KAWASAKI TX ROBOT SET, 5.4 FI ➢ KIT, 2-SLOT PASSTHROUGH, CONDOR 5.4 FI ➢ Configured Centris ➢ VACUUM ROBOT DRIVE, TRIAXIAL, EXTENDED Z ➢ BLADE, CERAMIC OPEN POCKET WITH DOME PADS, FX ROBOT, 300MM ➢ ASSEMBLY, X2 L-MOTION ANODIZED ALUM KALREZ 8085 SHAPE A SEAL PROFILE GATE ➢ ASSEMBLY, X2 L-MOTION BARE ALUM VITON SEAL GATE ➢ KIT,DUAL MONITOR ARM WITH KEYBOARD ASSY AND PC/MON ➢ HARNESS ASSY,FI PC TO KVM WITH EVC INTERFACE 10FT ➢ KIT, MOBILE WORKSTATION SINGLE 19" MONITOR PC SELE ➢ CABLE ASSY OPERATOR INTERFACE EVC M/M 75 FT ➢ iPUP-II Edwards iXL 180 ➢ ASSY, BMA ADVANTEDGE GT CHAMBER ➢ ASSY, COMMON IO CONTROLLER WITH ETHERCAT INTERFACE, FRAME B, ADVANTEDGE/TSV GT ➢ CHAMBER COOLING MANIFOLD, 300MM DPS 232 ➢ KIT, 1000T AND SLIT BAFFLE 0.25T MANOMETERS, GT ➢ MANOMETER, .25 TORR, 100 DEG. C, 1/2 VCR, HORIZ. CA ➢ XDCRPRESS 1000 TORR 1/2VCR 1% 9PIN DSUB ➢ TS HEATED MANOMETER ISO VALVE ASSY ➢ FORELINE : Manometer (XDCRPRESS ABS 10TORR 1/4VCR 0-10VDC OUT 9PD) ➢ ASSY, 4 ZONE V2 FIXED FULL SYM CATHODE, CENTRIS ➢ LID HPM Coated Al2O3, Dual Gas 300mm DPS ➢ HUB CENTER DUAL GAS SIDE FEED ➢ NOZZLE INSERT TGN Y2O3 ➢ KIT, KALREZ 8085 O-RING, TGN LID W/CERAMIC WLDMT ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID 1.110 CSD - Kalrez 8085" ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID 1.674 CSD - Kalrez 8085" ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID 2.734 CSD - Kalrez 8085" ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID .296 CSD - Kalrez 8085" ➢ SOURCE COIL 5.75/15 MESA HIGH POWER ➢ Lid Heater, O SHAPE ➢ PIPE COVER, PROCESS RING, C4Z V2 ESC ➢ SINGLE RING QUARTZ .16 HEIGHT 4ZONE ➢ Lower Chamber Liner, Y203 COAT, 4Z ➢ LINER UPPER THICK Y2O3 COATING 300MM DPS 532 ➢ LINER CATHODE Y203 W/SCREEN, 4Z ➢ Cover, screw, liner, 4Z ➢ Plasma Screen - Flow EQ, Yttria coated FE, 4Z ➢ Chamber Liner Door (single/dual shaft), Yttria coated ➢ Kalrez 8085 ➢ High Voltage Module ➢ RF GEN 13.56 MHZ, 6KW PARAMOUNT, 3PHASE 208 VA ➢ CABLE ASSY RF RG-217U 88FT 7/16M TO HN(M) ➢ MATCH RF 13.56 MHZ, 1.5KW PARAMOUNT 1513, 3PHASE 208 ➢ "Bias Generator ➢ 13.56Mhz, Paramount" ➢ CABLE ASSY RF RG-217/U 79FT HN(M) TO HN(M) R/A 2MH ➢ Bias Match, AE ➢ ASSY ESC STACK, FS, SE 4Z WITH FBR ➢ ASSEMBLY ESC BONDING, FULL SYM 4 ZONE V2 FS SE (Rev2b+) ➢ "FRC2 1000/1000 WITH IMPROVED FIRMWARE ➢ DLT2A213163R210" ➢ VALVE, THROTTLING GATE HEATED DN320 SERIES 65.1 RF IMMUNE DNET, ADVANTEDGE D8GT ➢ PUMP TURBO 2700RPM ISO320/KF40 1/4FVCR PURGE 240VAC ➢ CONTROLLER, TURBO PUMP ➢ KIT, MRAD DRIVER, HPS, ADVANTEDGE GT ➢ KIT, EYED IEP, ADVANTEDGE, MESA HPS ➢ Gas Panel, Centris Independent, 18 stick ➢ FILTER, NI, 1.125" C-SEAL, SANDWICH, OUTLET FILTRA ➢ LID HPM COATED AL203, DUAL GAS 300MM DPS ➢ PLASMA SCREEN Y203 COAT FLOW EQ ➢ DOOR SLIT VALVE Y203 COAT 300MM DPS232 ➢ LINER CATHODE Y203 W/SCREEN, 4Z ➢ Liner Lower Y2O3 Coat DPSII ➢ LINER UPPER THICK Y2O3 COATING 300MM DPS 532 ➢ Nozzle Insert TGN Y2O3 ➢ COVER, SCREW, LINER, 4 ZONE CATHODE