说明
Dry etch system配置
Top-mounted electronics and helium backing (Qty 2) Narrow-gap chambers, positions A/B Phase 3 robot 15-slot storage elevator ZA slit valves, positions A/B Wafer positioning sensor 2-stage cassette loadport (Qty 2) Monitors System SSD and CF card floppy emulator MXP Unibody chamber with narrow-gap lid Seiki STP-301CVB turbo pump Seiki SCU-350D controller MKS manometer (Qty 7) Gas sticks with Brooks GF100 MFCs Gases: HBr, NF3, NF3-2, N2, He/O2, Ar, CF4 (Qty 2) AMAT heat exchangers with 50ft stainless-steel hoses (Qty 2) ENI OEM 12B RF generators AC box at RF rackOEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
155465
晶圆尺寸：
未知
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
P5000 XT
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
155465
晶圆尺寸：
未知
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Dry etch system配置
Top-mounted electronics and helium backing (Qty 2) Narrow-gap chambers, positions A/B Phase 3 robot 15-slot storage elevator ZA slit valves, positions A/B Wafer positioning sensor 2-stage cassette loadport (Qty 2) Monitors System SSD and CF card floppy emulator MXP Unibody chamber with narrow-gap lid Seiki STP-301CVB turbo pump Seiki SCU-350D controller MKS manometer (Qty 7) Gas sticks with Brooks GF100 MFCs Gases: HBr, NF3, NF3-2, N2, He/O2, Ar, CF4 (Qty 2) AMAT heat exchangers with 50ft stainless-steel hoses (Qty 2) ENI OEM 12B RF generators AC box at RF rackOEM 型号描述
未提供文件
无文件